AbstractPhysicochemical properties of dimethylzinc, dimethylcadmium and diethylzinc have been investigated by means of vapor pressure measurement, mass spectroscopy and gas chromatography. The saturated vapor pressure‐temperature dependence of these alkyl organometallics was determined to be as followsThe temperature ranges for vapor phase decomposition for deposition of each metal were clarified, and vapor‐phase species released in the decompositions were investigated. These investigations on the organometallics are to provide basic material data for the establishment of organometallic chemical vapor deposition techniques for Group IIB‐VI comp