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Measurement of x‐ray absorption spectra of photoresists using a silicon lithium detector

 

作者: G. M. Wells,   J. W. Taylor,   F. Cerrina,   D. Pearson,   J. MacKay,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1992)
卷期: Volume 10, issue 6  

页码: 3252-3255

 

ISSN:1071-1023

 

年代: 1992

 

DOI:10.1116/1.585924

 

出版商: American Vacuum Society

 

关键词: PHOTORESISTS;X−RAY SPECTRA;ABSORPTION SPECTRA;LI−DRIFTED SI DETECTORS;ENERGY RESOLUTION;PMMA;ENERGY DEPENDENCE;resists;PMMA

 

数据来源: AIP

 

摘要:

We have developed a simple experimental technique for measuring the absorption spectrum of x‐ray photoresists in the region from 1000 to 3000 eV. Knowledge of the absorption characteristics of a photoresist allows selection of the most efficient range of energies to use for performing x‐ray exposures. The measurements were performed using the Medical Physics beamline on the University of Wisconsin Aladdin synchrotron source. The beamline is equipped with a lithium‐drifted silicon detector that provides an energy resolution of 150 eV. To avoid saturation of the Si(Li) detector, special ‘‘microbeams’’ of approximately 50 circulating electrons in the storage ring were employed. The beam intensity was monitored using a photodiode. The operation of the detector and associated diagnostic equipment will be described. Four by four millimeter square, 1.4 μm thick silicon nitride membranes were used as substrates for the resist films. Photoresist absorption was measured by comparing the transmission of silicon nitride membranes with and without photoresist coatings. Experimental results for both conventional and chemically amplified positive and chemically amplified negative x‐ray photoresists are presented.

 

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