Thin film interactions of Al and Al(Cu) on TiW
作者:
C. J. Palmstro&slash;m,
J. W. Mayer,
B. Cunningham,
D. R. Campbell,
P. A. Totta,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 58,
issue 9
页码: 3444-3448
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.335765
出版商: AIP
数据来源: AIP
摘要:
Thin‐film reactions of Al/Ti22W78(∼10 wt. % Ti) with and without ∼2 at. % Cu in the Al were investigated by transmission electron microscopy for vacuum annealing in the temperature range 300–600 °C. The reactions are nonuniform and the presence of Cu has little effect on the reaction kinetics. Reactions are grain boundary dominated and start at 400 °C with the formation of WAl12.
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