Mechanism study of deep-UV irradiated poly(methyl methacrylate)-azide resist system
作者:
C.C. Han,
J.C. Corelli,
期刊:
Radiation Effects and Defects in Solids
(Taylor Available online 1989)
卷期:
Volume 111-112,
issue 1-2
页码: 45-58
ISSN:1042-0150
年代: 1989
DOI:10.1080/10420158908212980
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
The photochemical reactions of resist films consisting of poly(methyl methacrylate) (PMMA) and aromatic azide at high concentraton (25 wt.%) were studied. Both p-azidobenzoic acid (PABA) and 2,6-bis(4-azidylbenzylidene)-4-methyl cyclohexanone(2,6-bisazide) were used as the azide compounds. Chemical analysis carried out on the photoproducts of deep-UV irradiated PMMA-azide films revealed them to consist of unreacted azide compound, primary amine, azo dye, and PMMA with pendant secondary amines formed by nitrene insertion reactions. It is concluded that formation of secondary amines resulting from nitrene insertion to the PMMA chain were mainly responsible for both the dissolution rate retardation and the image reversal observed in the exposed PMMA-azide resist.
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