首页   按字顺浏览 期刊浏览 卷期浏览 A miniature interferometry sensor for monitoring the changes of film thickness and refr...
A miniature interferometry sensor for monitoring the changes of film thickness and refractive index

 

作者: Chi Wu,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1994)
卷期: Volume 65, issue 4  

页码: 1021-1022

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1145109

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new miniature interferometer has recently been developed for monitoring the changes of film thickness and refractive index, wherein a semiconductor laser and a photodiode detector are integrated to form a laser/detector hybrid. The laser light is collimated by a lens. When the laser light hits a film, it is reflected twice by the two interfaces between the film and the surrounding mediums. The two reflected light beams are interfered at the detector by the same lens. Due to the interference, the detected intensity is a function of the film thickness. The swelling of thin gelatin gel film has been used to demonstrate the use of this novel sensor. The sensor is ready to be used in many applications, such as inside a vacuum chamber, on a robot arm, and in a small reaction container, wherever a conventional interferometric setup cannot be easily implemented because of its size.

 

点击下载:  PDF (194KB)



返 回