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A Liquid Silazane Precursor To Silicon Nitride

 

作者: Dietmar Seyferth,   Gary H. Wiseman,   Christian Prud'homme,  

 

期刊: Journal of the American Ceramic Society  （WILEY Available online 1983）
卷期: Volume 66, issue 1  

页码: 13-14

 

ISSN:0002-7820

 

年代: 1983

 

DOI:10.1111/j.1151-2916.1983.tb09979.x

 

出版商: Blackwell Publishing Ltd

 

数据来源: WILEY

 

摘要:

The reaction of dichlorosilane, H2SiCl2, with gaseous NH3in dichloromethane or diethyl ether solution results in the formation of a silazane oil containing silicon, hydrogen, and nitrogen in good yield. This ammonolysis product can be pyrolyzed in an N2atmosphere (temperature to 1150°C) to give α‐Si3N4in ∼70% yield. The ceramic product formed has a relatively porous, fine‐grained microstructure with some cracks and b

 

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