A method of preparing ion beams of known mass and charge for time‐of‐flight scattering and recoiling spectrometry (TOF‐SARS) using sequential deflection pulses (SDP) has been developed. A double‐pulsing sequence is described in which the first pulse is used to create ion pulses and the second pulse, triggered after a suitable delay, allows only the species of interest to be transmitted to the target. A mass resolution ofm/&Dgr;m=3–5 was achieved with the present system, eliminating the need for conventional mass resolution devices when high mass resolution is not required. Examples of the direct separation of Ar+and Ar2+ions from an ion beam and separation of Ar+and Ar2+scattering and recoiling spectra from an indium phosphide (InP) surface are provided.