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Monolithic GaAs/AlGaAs diode laser/deflector devices for light emission normal to the surface

 

作者: T. H. Windhorn,   W. D. Goodhue,  

 

期刊: Applied Physics Letters  (AIP Available online 1986)
卷期: Volume 48, issue 24  

页码: 1675-1677

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.96802

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Light emission normal to the surface of a GaAs/AlGaAs wafer has been obtained by fabricating edge‐emitting double‐heterostructure diode lasers with a monolithic 45° deflector adjacent to one of the laser facets. The deflector and adjacent facet were formed by ion beam assisted etching, while the other facet was cleaved. Diode laser/deflector devices with two etched laser facets could be used to fabricate monolithic two‐dimensional laser arrays.

 

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