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The effects of F2concentration on discharge pumped KrF laser characteristics

 

作者: Qihong Lou,   Takashi Yagi,   Kaoru Igarashi,   Hideaki Saito,  

 

期刊: Journal of Applied Physics  （AIP Available online 1990）
卷期: Volume 68, issue 6  

页码: 2572-2576

 

ISSN:0021-8979

 

年代: 1990

 

DOI:10.1063/1.346481

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The F2concentration , laser output power , laser pulse duration, and laser beam patterns of discharge pumped KrF excimer laser are measured at high repetition rate during long‐term operation. The effects of the F2concentration on the laser output characteristics are analyzed.

 

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