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Interference position monitoring system employing Ronchi gratings

 

作者: D. P. Jablonowski,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1976)
卷期: Volume 47, issue 1  

页码: 96-100

 

ISSN:0034-6748

 

年代: 1976

 

DOI:10.1063/1.1134502

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A technique for obtaining positional information using a Ronchi grating is described. By employing the grating as a diffraction element, modulation of the phase of a coherent light beam is accomplished. The phase contains information as to the position of the beam on the grating surface. The use of an interference technique allows one to monitor the light phase, and therefore the beam’s position. Using a single grating, directional as well as positional information is obtained in two dimensions. Advantages and other system characteristics are described.

 

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