Molecular beam epitaxy beam flux modeling
作者:
Jay A. Curless,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1985)
卷期:
Volume 3,
issue 2
页码: 531-534
ISSN:0734-211X
年代: 1985
DOI:10.1116/1.583169
出版商: American Vacuum Society
关键词: MOLECULAR BEAM EPITAXY;GALLIUM ARSENIDES;THICKNESS;MORPHOLOGY;COMPUTERIZED SIMULATION;MATHEMATICAL MODELS
数据来源: AIP
摘要:
A computer model for the effusion process commonly utilized in molecular beam epitaxy (MBE) is presented. The model is capable of simulating effusion sources of both conical and cylindrical design. The results of the model, for one MBE setup, shows that the gallium flux incident on a 4×4cm area has greater than a 30% variation and the gallium to arsenic ratio incident upon the same region varies by a factor of 2. A gallium arsenide (GaAs) layer was then grown under approximately the same conditions as used in the simulation. Observation of the layer’s thickness and morphology show reasonable agreement with the computer model’s results.
点击下载:
PDF
(367KB)
返 回