首页   按字顺浏览 期刊浏览 卷期浏览 Ion implantation distributions in inhomogeneous materials
Ion implantation distributions in inhomogeneous materials

 

作者: K. B. Winterbon,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 31, issue 10  

页码: 649-651

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89511

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The integral equation for ion‐implantation range, damage, and ionization distributions in random media is generalized to allow nonuniform target materials. The generalization range equation is solved in the path‐length approximation, using power‐law cross sections, for a target consisting of two dissimilar half‐spaces. There is a discontinuity in the distribution at the interface, proportional to the value of the distribution in the material the projectile is leaving; the constant of proportionality is evaluated explicitly.

 

点击下载:  PDF (195KB)



返 回