Microfabrication of Silicon/Ceramic Hybrid Cantilever for Scanning Probe Microscope and Sensor Applications
作者:
Takayuki Wakayama,
Toshinari Kobayashi,
Nobuya Iwata,
Nozomi Tanifuji,
Yasuaki Matsuda,
Syoji Yamada,
期刊:
AIP Conference Proceedings
(AIP Available online 1903)
卷期:
Volume 696,
issue 1
页码: 264-270
ISSN:0094-243X
年代: 1903
DOI:10.1063/1.1639705
出版商: AIP
数据来源: AIP
摘要:
We present here new cantilevers for scanning probe microscopy (SPM) and sensor applications, which consist of silicon cantilever beam and ceramic pedestal. Silicon is only used to make cantilever beams and tips. Precision‐machinery‐made ceramics replaces silicon pedestal part. The ceramics was recently developed by Sumikin Ceramics and Quarts Co., Ltd. and can be machined precisely with end mill cutting. Many silicon beams are fabricated at once from a wafer using batch fabrication method. Therefore, SPM probes can be fabricated in high productivity and in low cost. These beams are transferred with transfer technique and are bonded on the ceramic pedestal with epoxy glue. We demonstrate here atomic force microscope (AFM) and gas sensor applications of the hybrid structure. In a gas sensor application, the ends of the cantilever are selectively modified with zeolite crystals as a sensitive layer. The bonding strength is enough for each application. © 2003 American Institute of Physics
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