Optical detection for scanning microdeformation microscopy
作者:
B. Cretin,
P. Vairac,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 15
页码: 2082-2084
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119348
出版商: AIP
数据来源: AIP
摘要:
Scanning microdeformation microscopy is a kind of ac contact force microscopy sensitive to the variations of the local elastic constants of the investigated material. In this letter a new optical interferometer designed for detecting the small displacement of the cantilever is reported. The setup is described and some applications of the laser probe to scanning microdeformation microscopy are demonstrated. ©1997 American Institute of Physics.
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