A tuned Langmuir probe for measurements in rf glow discharges
作者:
Ajit P. Paranjpe,
James P. McVittie,
Sidney A. Self,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 67,
issue 11
页码: 6718-6727
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.345109
出版商: AIP
数据来源: AIP
摘要:
Measurements of charged‐particle concentrations and the electron energy distribution function (EEDF) have been made in Ar and SF6glow discharges using a tuned Langmuir probe technique. A simple passive circuit connected to the probe when properly tuned increases the impedance between the probe and ground, thereby forcing the probe to follow the instantaneous plasma potential. In this manner, rf‐induced distortion of the probe characteristic is mitigated. At 13.56 MHz the electron collection characteristic of a detuned probe is distorted by rf interference; the ion collection characteristic is unaffected. The EEDF is highly non‐Maxwellian in argon discharges, but quite Maxwellian in SF6discharges. The mean electron energy increases with decreasing pressure and increasing power in argon discharges, but is independent of pressure and power in SF6discharges. The measured distribution functions and charged particle concentrations are in good agreement with calculations.
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