We report growth of (InAs)1(AlAs)1and (InAs)2(AlAs)2strained layer superlattices by migration enhanced epitaxy. The samples were grown on InP (001) substrates and characterized by Raman spectroscopy, x‐ray diffraction, and transmission electron microscopy. Satellite peaks in the x‐ray data confirm the intended periodicity and indicate the presence of some disorder in the monolayer sample. The energies of the zone folded and quantum confined optic phonons are in reasonable agreement with calculations based on one‐dimensional elastic continuum and linear chain models.