Aging effect of Co/C soft x-ray multilayer mirrors
作者:
E. Y. Jiang,
H. L. Bai,
R. Y. Tian,
C. D. Wang,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 81,
issue 1
页码: 184-189
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.363839
出版商: AIP
数据来源: AIP
摘要:
The effect of aging on Co/C multilayer x-ray mirrors is presented. One significant result is the enhancement of the reflectivity at grazing incidence with time for the Co/C multilayers with C-on-top stored in air or argon and Co-on-top stored in argon. This can be interpreted in terms of a Co–C phase-separation at Co–C interfaces due to the positive enthalpy of Co–C mixing. Results also show that oxidation of the surface of Co-on-top Co/C multilayers plays an important role in the decrease of reflectivity. The oxidation can be prevented by storing the multilayers in an oxygen-free atmosphere or by depositing amorphous carbon as the top layer. The reflectivity of tarnished multilayers can be restored by removing the oxides by wet chemical methods. ©1997 American Institute of Physics.
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