A positron annihilation study of defects in neutron transmutation‐doped float‐zone (Ar)‐Si
作者:
Werner Puff,
Xiang‐ti Meng,
期刊:
Journal of Applied Physics
(AIP Available online 1993)
卷期:
Volume 73,
issue 2
页码: 648-651
ISSN:0021-8979
年代: 1993
DOI:10.1063/1.353346
出版商: AIP
数据来源: AIP
摘要:
Annealing of defects introduced by neutron transmutation doping of float‐zone silicon has been investigated by positron lifetime spectroscopy and Doppler‐broadening measurements. It is shown that the main defects anneal out at about 150 and 500 °C. During annealing, the formation of bigger defect complexes can be seen.
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