Possible contribution of SiH2and SiH3in the plasma‐induced deposition of amorphous silicon from silane
作者:
Stan Veprˇek,
Maritza G. J. Veprˇek‐Heijman,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 18
页码: 1766-1768
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.103221
出版商: AIP
数据来源: AIP
摘要:
A self‐consistent quantitative analysis of recent kinetic data on the role of di‐ and trisilane in the plasma‐induced deposition of amorphous silicon from monosilane confirms the conclusion that the dominant reactive intermediate responsible for the formation of di‐ and trisilane and, consequently, for the deposition of a high quality amorphous silicon is SiH2. The data show that the SiH3radical may play only a negligible, if any, role in this process.
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