Theory of dopant diffusion assuming nondilute concentrations of dopant‐defect pairs
作者:
M. E. Law,
H. Park,
P. Novell,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 26
页码: 3488-3489
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105662
出版商: AIP
数据来源: AIP
摘要:
Current dopant diffusion theory is based on dopant‐point‐defect interaction, and assumes that the number of dopant‐defect pairs is much smaller than the unpaired dopant concentration. In cases where a large number of excess defects are created from implantation damage, this may no longer be a valid assumption. A new derivation of the dopant and defect equations is presented which is valid for any concentration of dopant‐defect pairs.
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