High‐temperature thin‐film Pt–Ir thermocouple with fast time response
作者:
H. M. Tong,
G. Arjavalingam,
R. D. Haynes,
G. N. Hyer,
J. J. Ritsko,
期刊:
Review of Scientific Instruments
(AIP Available online 1987)
卷期:
Volume 58,
issue 5
页码: 875-877
ISSN:0034-6748
年代: 1987
DOI:10.1063/1.1139649
出版商: AIP
数据来源: AIP
摘要:
We have developed a thin‐film Pt–Ir thermocouple which exhibits bulklike thermoelectric behavior up to 790 °C, the highest temperature observed with thin‐film pure‐element thermocouples. Using aQ‐switched Nd:YAG laser and a signal averaging oscilloscope, its thermal response time was measured to be 60 ns. The ease of implementation in electronic devices coupled with the reproducibility over a wide temperature range make this thin‐film thermocouple well suited for monitoring instantaneous temperatures during device processing.
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