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Dynamic piezoelectric translation devices

 

作者: D. W. Pohl,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1987)
卷期: Volume 58, issue 1  

页码: 54-57

 

ISSN:0034-6748

 

年代: 1987

 

DOI:10.1063/1.1139566

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The principle of inertial sliding of a platform on a periodically accelerated support is exploited for the design of a piezoelectric fine‐positioning device. The device provides step sizes of 0.04–0.2 &mgr;, speeds of up to 0.2 mm/s, and practically unlimited translation range. It is powered by a sawtooth electric waveform of 60–300‐V amplitude and useable for loads of up to 1 kg and probably even more. Mechanical parts and driver electronics are extremely simple, reliable, and easy to operate.

 

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