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High efficiency top surface‐emitting lasers fabricated by four implantation using tungsten wire as mask

 

作者: Ying Liu,   Xiaobo Zhang,   Xiuying Jiang,   Suping Liu,   Xuemei Li,   Guotong Du,   Dingsan Gao,   Shiming Lin,   Xuejun Kang,   Honghai Gao,   Junhua Gao,   Hongjie Wang,  

 

期刊: Applied Physics Letters  （AIP Available online 1995）
卷期: Volume 67, issue 24  

页码: 3549-3550

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114917

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report the results of a high efficiency room temperature continuous wave (cw) vertical‐cavity surface‐emitting laser. The structure is obtained by four deep H+implantation using tungsten wires as the mask. The fabrication process is the simplest ever reported in vertical‐cavity surface‐emitting laser fabrication. The largest differential quantum efficiency of 65% and maximum cw light output power over 4 mW have been achieved for the 15×15 &mgr;m2device. ©1995 American Institute of Physics.

 

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