首页   按字顺浏览 期刊浏览 卷期浏览 Radiation‐induced defect states in low to moderately boron‐doped silicon
Radiation‐induced defect states in low to moderately boron‐doped silicon

 

作者: O. O. Awadelkarim,   B. Monemar,  

 

期刊: Journal of Applied Physics  (AIP Available online 1988)
卷期: Volume 64, issue 11  

页码: 6301-6305

 

ISSN:0021-8979

 

年代: 1988

 

DOI:10.1063/1.342089

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Low to moderately boron‐doped silicon crystals were irradiated at room temperature with a 2.0‐MeV electron beam and studied by means of deep‐level transient spectroscopy. New dominant hole trapsH(0.12) andH(0.07) located, respectively, at 0.12 and 0.07 eV above the valence band, and an electron trapE(0.59) located at 0.59 eV below the conduction band are reported. The statesH(0.12), produced directly after irradiation, andH(0.07), formed following 400 °C annealing, are observed in samples of low boron contents (∼1014cm−3). The stateE(0.59), on the other hand, is observed after 400 °C annealing in the moderately boron‐doped samples (∼1015cm−3). Based on the thermal stability and energy position of these states tentative defect identifications are proposed by correlation with published data. Other previously reported hole traps are observed at 0.22 and 0.34 eV above the valence band and are ascribed to the divacancyV2(0/+) and the carbon interstitial‐carbon substitutional pair, respectively.

 

点击下载:  PDF (552KB)



返 回