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Thin film BaxSr1-xTiO3ku- and k-band phase shifters grown on MgO substrates

 

作者: F.W. Van Keuls,   C.H. Mueller,   F.A. Miranda,   R.R. Romanofsky,   J.S. Horwitz,   W. Chang,   W.J. Kim,  

 

期刊: Integrated Ferroelectrics  (Taylor Available online 2000)
卷期: Volume 28, issue 1-4  

页码: 49-61

 

ISSN:1058-4587

 

年代: 2000

 

DOI:10.1080/10584580008222220

 

出版商: Taylor & Francis Group

 

关键词: BaxSr1-xTiO3;phase shifters;tunable microwave devices

 

数据来源: Taylor

 

摘要:

We report measurements of gold circuits fabricated on four BaxSr1-xTiO3ferroelectric films doped with 1% Mn grown on MgO substrates by laser ablation. Low frequency (1 MHz) measurements of σTand tanδ on interdigital capacitors are compared with high frequency measurements of phase shift and insertion loss on coupled microstrip phase shifters patterned onto the same films. The variation in temperature of both high and low frequency device parameters is compared. Annealed with amorphous buffer layer and unannealed films are compared. Room temperature figures of merit of phase shift per insertion loss of up to 58.4°/dB at 18 GHz and 400 V dc bias were measured.

 

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