Cryogenic vacuum high frequency probe station

 

作者: J. Laskar,   J. Kolodzey,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena  （AIP Available online 1990）
卷期: Volume 8, issue 5  

页码: 1161-1165

 

ISSN:0734-211X

 

年代: 1990

 

DOI:10.1116/1.584936

 

出版商: American Vacuum Society

 

关键词: GALLIUM ARSENIDES;SILICON;INTERFACES;THERMAL DESORPTION SPECTROSCOPY;KINETICS;LASER RADIATION;FLUORESCENCE;ISLAND STRUCTURE;LAYERS;ULTRAHIGH VACUUM;ELECTRON DIFFRACTION;AUGER ELECTRON SPECTROSCOPY;INTERFACE STRUCTURE

 

数据来源: AIP

 

 

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