首页   按字顺浏览 期刊浏览 卷期浏览 Numerical and experimental studies of the sputter yield amplification effect
Numerical and experimental studies of the sputter yield amplification effect

 

作者: C. Nender,   I.V. Katardjiev,   J.P. Biersack,   S. Berg,   A.M. Barklund,  

 

期刊: Radiation Effects and Defects in Solids  (Taylor Available online 1994)
卷期: Volume 130-131, issue 1  

页码: 281-291

 

ISSN:1042-0150

 

年代: 1994

 

DOI:10.1080/10420159408219790

 

出版商: Taylor & Francis Group

 

关键词: sputtering yield amplification;preferential sputtering;enhanced sputtering

 

数据来源: Taylor

 

摘要:

Recently we have demonstrated the existence of the so-called sputter yield amplification (SYA) effect, based on the preferential sputtering of the lighter species during ion bombardment of composite solids and resulting in enhanced partial sputtering yield of the lighter species as compared to the elemental sputtering yield. In specific cases the enhancement of the sputtering yield could reach one order of magnitude or more. This effect has been both numerically studied and experimentally observed during low energy ion bombardment of i) thin films of low mass on heavy substrates; ii) thin films of high mass on light substrates; iii) simultaneous high mass atom deposition on light substrates; iv) simultaneous low mass atom deposition on heavy substrates. In all cases sputter yield enhancement of the low mass species is observed but in each individual case different specific goals are achieved. For example, in case i) much faster etch rate of the thin film is achieved than what is expected from the elemental sputtering yield. In cases ii) and iii) faster erosion of the target is achieved in view of sputter-deposition processes. In case iv) a nearly complete removal of the deposited species with a partial sputtering yield substantially higher than the elemental sputtering yield is achieved in view of selective ion beam assisted deposition. The SYA effect is also observed in the net growth regime, i.e. during the deposition of composite films with ion co-bombardment. In this case the composition of the growing film differs from that of the deposition flux.

 

点击下载:  PDF (702KB)



返 回