作者: Yicheng Wang,
期刊: Applied Physics Letters (AIP Available online 1995) 卷期: Volume 66, issue 17
页码: 2186-2187
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113941
出版商: AIP
数据来源: AIP
摘要:
A new method is described for calculating the rf voltage division between two plasma sheaths in the capacitively coupled asymmetric Gaseous Electronics Conference reference cell, where the effective area ratio of the electrodes is unknown. The rf voltage across the ground sheath is found to decrease with increasing total electrode rf voltage, indicating that the effective area of the ground electrode increases significantly. ©1995 American Institute of Physics.
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