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Radio frequency voltage division between two plasma sheaths in the Gaseous Electronics Conference reference cell

 

作者: Yicheng Wang,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 17  

页码: 2186-2187

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113941

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new method is described for calculating the rf voltage division between two plasma sheaths in the capacitively coupled asymmetric Gaseous Electronics Conference reference cell, where the effective area ratio of the electrodes is unknown. The rf voltage across the ground sheath is found to decrease with increasing total electrode rf voltage, indicating that the effective area of the ground electrode increases significantly. ©1995 American Institute of Physics.

 

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