Misfit dislocations and the morphology of gallium aluminum arsenide epitaxial layers grown on gallium arsenide
作者:
H. Booyens,
M. B. Small,
R. M. Potemski,
J. H. Basson,
期刊:
Journal of Applied Physics
(AIP Available online 1981)
卷期:
Volume 52,
issue 6
页码: 4328-4329
ISSN:0021-8979
年代: 1981
DOI:10.1063/1.329248
出版商: AIP
数据来源: AIP
摘要:
Linear morphological features which are readily revealed using Nomarski interference contrast microscopy have been observed on the surfaces of GaxAl1−xAs epitaxial layers grown by liquid phase epitaxy LPE on GaAs substrates at 950 °C. These features are introduced along one <110≳ direction in the (001) growth surface only. Annealing at the growth temperature produces a similar set of features in the perpendicular <110≳ direction. Photoluminescence topographs reveal dark lines in the substrates that are directed parallel to the sets of surface features in both annealed and unannealed crystals.
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