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Misfit dislocations and the morphology of gallium aluminum arsenide epitaxial layers grown on gallium arsenide

 

作者: H. Booyens,   M. B. Small,   R. M. Potemski,   J. H. Basson,  

 

期刊: Journal of Applied Physics  (AIP Available online 1981)
卷期: Volume 52, issue 6  

页码: 4328-4329

 

ISSN:0021-8979

 

年代: 1981

 

DOI:10.1063/1.329248

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Linear morphological features which are readily revealed using Nomarski interference contrast microscopy have been observed on the surfaces of GaxAl1−xAs epitaxial layers grown by liquid phase epitaxy LPE on GaAs substrates at 950 °C. These features are introduced along one <110≳ direction in the (001) growth surface only. Annealing at the growth temperature produces a similar set of features in the perpendicular <110≳ direction. Photoluminescence topographs reveal dark lines in the substrates that are directed parallel to the sets of surface features in both annealed and unannealed crystals.

 

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