Hydrogenated amorphous silicon selenium alloy was prepared by plasma enhanced chemical vapor deposition with hydrogen dilution. The alloy films exhibited a low hydrogen content and a dense amorphous network. Light induced photoconductivity degradation and light induced variation of dangling bond density of the alloy films were investigated under 1 sun white light and an intense light illumination. The results show that the amorphous silicon selenium alloy is a stable photovoltaic material.