Si1−xGex/Si multiple quantum well infrared detector
作者:
R. P. G. Karunasiri,
J. S. Park,
K. L. Wang,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 20
页码: 2588-2590
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.105911
出版商: AIP
数据来源: AIP
摘要:
A long‐wavelength infrared detector is demonstrated using Si1−xGex/Si multiple quantum wells for the first time. A broad peak in the photoresponse is observed near 9 &mgr;m with a full width at half maximum of about 80 meV which provides the response in the 6–12 &mgr;m range. The position of the peak in the photoresponse is in good agreement with that observed in the absorption measurement using a waveguide geometry. A peak responsivity of about 0.3 A/W and detectivity ofD*=1×109cm &sqrt;Hz/W at 77 K are achieved. This suggests the possibility of monolithic integration of Si1−xGex/Si multiple quantum well detectors with signal processing electronics for potential focal plane array applications.
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