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Si1−xGex/Si multiple quantum well infrared detector

 

作者: R. P. G. Karunasiri,   J. S. Park,   K. L. Wang,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 59, issue 20  

页码: 2588-2590

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105911

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A long‐wavelength infrared detector is demonstrated using Si1−xGex/Si multiple quantum wells for the first time. A broad peak in the photoresponse is observed near 9 &mgr;m with a full width at half maximum of about 80 meV which provides the response in the 6–12 &mgr;m range. The position of the peak in the photoresponse is in good agreement with that observed in the absorption measurement using a waveguide geometry. A peak responsivity of about 0.3 A/W and detectivity ofD*=1×109cm &sqrt;Hz/W at 77 K are achieved. This suggests the possibility of monolithic integration of Si1−xGex/Si multiple quantum well detectors with signal processing electronics for potential focal plane array applications.

 

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