Magnetron etching of polysilicon: Electrical damage
作者:
W. M. Greene,
J. B. Kruger,
G. Kooi,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1991)
卷期:
Volume 9,
issue 2
页码: 366-369
ISSN:1071-1023
年代: 1991
DOI:10.1116/1.585577
出版商: American Vacuum Society
关键词: SILICON;LEAKAGE CURRENT;ETCHING;MOS JUNCTIONS;MAGNETRONS;PLASMA DENSITY;DAMAGE;THIN FILMS;DEGRADATION;GATES;Si
数据来源: AIP
摘要:
We report comparison of etch damage between reactive ion and magnetron plasma etch environments and propose a qualitative model. Gate oxide damage is controlled by both plasma current and voltage and under some conditions can be worse for magnetron etching, especially in the case of very thin gate oxide. Moderate magnetron voltages (<50 V) may still be high enough (given the increased plasma density) to charge polysilicon gates causing degradation. Further reduction of voltage (and hence current) through modification of geometry and chemistry can reduce this damage to gate oxide and the gate edge diode for magnetron etching, producing results superior to reactive ion etching.
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