High‐power radio‐frequency plasma source
作者:
C. Craig Petty,
Donald K. Smith,
期刊:
Review of Scientific Instruments
(AIP Available online 1986)
卷期:
Volume 57,
issue 10
页码: 2409-2414
ISSN:0034-6748
年代: 1986
DOI:10.1063/1.1139086
出版商: AIP
数据来源: AIP
摘要:
A high‐power radio‐frequency plasma source was built and tested for an antenna frequency of 2.45 MHz. A puff valve fed hydrogen gas into a plasma chamber made from 4‐in.‐diam Pyrex tubing. A helical antenna was wound directly around this chamber. The plasma source was surrounded by a magnetic bucket which used a longitudinal line‐cusp geometry. For 20 kW of rf input power, the peak electron density was 2.0×1019m−3, the electron temperature was 2.0 eV, the ion temperature was 0.9 eV, and the atomic hydrogen density was 4.4×1019m−3. For 90 kW of rf input power, the peak electron density was 8.9×1019m−3, the electron temperature was 2.5 eV, the ion temperature was 3.0 eV, and the atomic hydrogen density was 2.3×1019m−3. The plasma source had a typical current efficiency of 6 A/kW. A theoretical model for the plasma loading resistance was developed.
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