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Fabrication of infrared photodetectors

 

作者: Patrick Bond,   Dipankar Sengupta,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 9, issue 1-3  

页码: 81-86

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508012910

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

This paper presents the fabrication of an integrated optoelectronic circuit consisting of a waveguide and photodetector. Fabrication of the waveguides took place in a RIBE system with 1·5 sccm CH4/H2(60:40) and 0·5 sccm Ar. Wet etching defines the photodetector regions. The detection of surface damage is minimal, using a novel differential optical reflectance technique.

 

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