Investigation on a novel vacuum microelectronic pressure sensor with stepped field emission array
作者:
S. H. Xia,
J. Liu,
D. F. Cui,
J. H. Han,
S. F. Chen,
L. Wang,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1997)
卷期:
Volume 15,
issue 4
页码: 1573-1576
ISSN:1071-1023
年代: 1997
DOI:10.1116/1.589403
出版商: American Vacuum Society
数据来源: AIP
摘要:
This article investigates a novel vacuum microelectronic pressure sensor in which the cathode emission array is distributed over a stepped cathode base instead of over a conventional flat cathode base. Our computer simulation results indicate that using the stepped field emission array gives the potential of increasing the sensor’s sensitivity and expanding its measurement range. Computer simulations are presented, and some experimental results are briefly reported.
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