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Investigation on a novel vacuum microelectronic pressure sensor with stepped field emission array

 

作者: S. H. Xia,   J. Liu,   D. F. Cui,   J. H. Han,   S. F. Chen,   L. Wang,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1997)
卷期: Volume 15, issue 4  

页码: 1573-1576

 

ISSN:1071-1023

 

年代: 1997

 

DOI:10.1116/1.589403

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

This article investigates a novel vacuum microelectronic pressure sensor in which the cathode emission array is distributed over a stepped cathode base instead of over a conventional flat cathode base. Our computer simulation results indicate that using the stepped field emission array gives the potential of increasing the sensor’s sensitivity and expanding its measurement range. Computer simulations are presented, and some experimental results are briefly reported.

 

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