首页   按字顺浏览 期刊浏览 卷期浏览 Reliable substrate temperature measurements for high temperature AlGaAs molecular‐beam ...
Reliable substrate temperature measurements for high temperature AlGaAs molecular‐beam epitaxy growth

 

作者: S. Strite,   M. Kamp,   H. P. Meier,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1995)
卷期: Volume 13, issue 2  

页码: 290-292

 

ISSN:1071-1023

 

年代: 1995

 

DOI:10.1116/1.588367

 

出版商: American Vacuum Society

 

关键词: TERNARY COMPOUNDS;ALUMINIUM ARSENIDES;GALLIUM ARSENIDES;MOLECULAR BEAM EPITAXY;TEMPERATURE MEASUREMENT;SUBSTRATES;CONTROL SYSTEMS;OPTICAL PYROMETERS;DESORPTION;TEMPERATURE RANGE 0400−1000 K;(Al,Ga)As

 

数据来源: AIP

 

摘要:

We describe a reproducible and precise temperature control system for the molecular beam epitaxial growth of AlGaAs at substrate temperatures in the 700 °C range. Coating of the optical pyrometer window was observed to dramatically affect the pryometer readings making it an unreliable temperature measurement technique. By observing pyrometer interference oscillations during both GaAs and AlGaAs epitaxy, the Ga desorption rate during AlGaAs growth was estimated. The known temperature dependence of the Ga desorption rate allowed the substrate temperature to be calculated, and corrected, when necessary, during the growth. This method allowed the absolute AlGaAs substrate temperature to be controlled within ±3 °C over a six month production cycle.

 

点击下载:  PDF (67KB)



返 回