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High‐power cw vertical‐cavity top surface‐emitting GaAs quantum well lasers

 

作者: B. Tell,   Y. H. Lee,   K. F. Brown‐Goebeler,   J. L. Jewell,   R. E. Leibenguth,   M. T. Asom,   G. Livescu,   L. Luther,   V. D. Mattera,  

 

期刊: Applied Physics Letters  (AIP Available online 1990)
卷期: Volume 57, issue 18  

页码: 1855-1857

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.104038

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have devised a novel vertical‐cavity top surface‐emitting GaAs quantum well laser structure which operates at 0.84 &mgr;m. The laser combines peripheral current injection with efficient heat removal and uses only the epitaxially grown semiconductor layers for the output mirrors. The structure is obtained by a patterned deep H+implantation and anneal cycle which maintains surface conductivity while burying a high resistance layer. Peripheral injection of current occurs from the metallized contact area into the nonimplanted nonmetallized emission window. For 10‐&mgr;m‐diam emitting windows, ∼4 mA thresholds with continuous‐wave (cw) room‐temperature output powers ≳1.5 mW are obtained. Larger diameter emitting windows have maximum cw output powers greater than 3 mW. These are the highest cw powers achieved to date in current injected vertical‐cavity surface‐emitting lasers.

 

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