High‐power cw vertical‐cavity top surface‐emitting GaAs quantum well lasers
作者:
B. Tell,
Y. H. Lee,
K. F. Brown‐Goebeler,
J. L. Jewell,
R. E. Leibenguth,
M. T. Asom,
G. Livescu,
L. Luther,
V. D. Mattera,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 57,
issue 18
页码: 1855-1857
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.104038
出版商: AIP
数据来源: AIP
摘要:
We have devised a novel vertical‐cavity top surface‐emitting GaAs quantum well laser structure which operates at 0.84 &mgr;m. The laser combines peripheral current injection with efficient heat removal and uses only the epitaxially grown semiconductor layers for the output mirrors. The structure is obtained by a patterned deep H+implantation and anneal cycle which maintains surface conductivity while burying a high resistance layer. Peripheral injection of current occurs from the metallized contact area into the nonimplanted nonmetallized emission window. For 10‐&mgr;m‐diam emitting windows, ∼4 mA thresholds with continuous‐wave (cw) room‐temperature output powers ≳1.5 mW are obtained. Larger diameter emitting windows have maximum cw output powers greater than 3 mW. These are the highest cw powers achieved to date in current injected vertical‐cavity surface‐emitting lasers.
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