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Picosecond laser sputtering of sapphire at 266 nm

 

作者: A. C. Tam,   J. L. Brand,   D. C. Cheng,   W. Zapka,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 20  

页码: 2045-2047

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.102100

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We observe that 266 nm laser pulses of 30 ps duration and fluence near 10 J/cm2causes reproducible surface sputtering and etching of crystalline sapphire in air. The etching rate for the initial ten pulses is relatively slow, 0.04 &mgr;m/pulse, producing a smooth surface of the etched area and a broad‐angle plume emission. After some 20 pulses, the etching rate is dramatically faster, 0.5 &mgr;m/pulse, producing a rough etched surface and a plume composed of broad‐angle emission as well as a narrow perpendicular jet emission. Micron‐sized depressions can be made on the sapphire with no visible damage or cracking to the surroundings.

 

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