Method of fabricating a free‐standing diamond single crystal using growth from the vapor phase
作者:
J. B. Posthill,
D. P. Malta,
T. P. Humphreys,
G. C. Hudson,
R. E. Thomas,
R. A. Rudder,
R. J. Markunas,
期刊:
Journal of Applied Physics
(AIP Available online 1996)
卷期:
Volume 79,
issue 5
页码: 2722-2727
ISSN:0021-8979
年代: 1996
DOI:10.1063/1.361144
出版商: AIP
数据来源: AIP
摘要:
By combining a low temperature (600 °C) chemical vapor deposition process for homoepitaxial diamond and conventional ion implantation, we have made and lifted off a synthetic diamond single crystal plate. Before growth, a type Ia C(100) crystal was exposed to a self implant of 190 keV energy and dose of 1×1016cm−2. Homoepitaxial diamond growth conditions were used that are based on water‐alcohol source chemistries. To achieve layer separation (‘‘lift‐off’’), samples were annealed to a temperature sufficient to graphitize the buried implant‐damaged region. Contactless electrochemical etching was found to remove the graphite, and a transparent synthetic (100) single crystal diamond plate of 17.5 &mgr;m thickness was lifted off. This free‐standing diamond single crystal plate was characterized and found to be comparable to homoepitaxial films grown on unimplanted single crystal diamond. ©1996 American Institute of Physics.
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