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The electron temperature in a medium‐pressure radio‐frequency flowing positive column plasma

 

作者: Jen‐Shih Chang,  

 

期刊: Journal of Applied Physics  （AIP Available online 1978）
卷期: Volume 49, issue 3  

页码: 1287-1288

 

ISSN:0021-8979

 

年代: 1978

 

DOI:10.1063/1.325022

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An expression for the electron temperature in a medium‐pressure radio‐frequency flowing positive column plasma has been derived for a cylindrical discharge tube. The effect of flow on electron temperature increases as the product of gas pressure and tube radius decreases.

 

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