Theoretical and experimental investigations of the electronic structure of oxygen on silicon
作者:
M. Chen,
Inder P. Batra,
C. R. Brundle,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1979)
卷期:
Volume 16,
issue 5
页码: 1216-1220
ISSN:0022-5355
年代: 1979
DOI:10.1116/1.570194
出版商: American Vacuum Society
关键词: SILICON;SURFACES;OXYGEN;ELECTRONIC STRUCTURE;CHEMISORPTION;CHEMISORPTION;SIMULATION;ATOMS;MOLECULES;LCAO METHOD;PHOTOEMISSION;ULTRAVIOLET RADIATION;X RADIATION;HARTREE−FOCK METHOD;BINDING ENERGY
数据来源: AIP
摘要:
While the oxidation stages of silicon beyond one monolayer have been extensively documented by photoemission and Auger experiments, the question as to whether initial chemisorption of oxygen is molecular or dissociative is controversial. We have carried out theoretical calculations using the extended tight‐binding method simulating both O2and O overlayer adsorption on Si(111) surface. Comparison of published and our new uv photoemission spectra with our calculated density of states indicates a better agreement with the dissociated oxygen model than with the molecular one. We have also studied the x‐ray photoemission of oxygen on Si(111) from submonolayer to several monolayers of oxide (∠ 8Å). Our data is consistent with initial dissociative adsorption but incompatible with molecular adsorption.
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