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Energy of positive ions absorbed by negatively pulsed electrodes in two and three component plasmas

 

作者: Ali Amin,   Hyun‐Soo Kim,   Seungjun Yi,   Karl E. Lonngren,   Igor Alexeff,  

 

期刊: Journal of Applied Physics  （AIP Available online 1995）
卷期: Volume 77, issue 8  

页码: 3674-3678

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.358605

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The temporal variation of the energy of positive ions deposited in metal electrodes inserted in a plasma to which a negative voltage step is applied is computed. Effects of impurity positive or negative ions upon the plasma source ion implantation process are calculated. ©1995 American Institute of Physics. 

 

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