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Persistence pays off: Sir Charles Oatley and the scanning electron microscope

 

作者: T. E. Everhart,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1996)
卷期: Volume 14, issue 6  

页码: 3620-3624

 

ISSN:1071-1023

 

年代: 1996

 

DOI:10.1116/1.588737

 

出版商: American Vacuum Society

 

数据来源: AIP

 

摘要:

Shortly after World War II, Sir Charles Oatley initiated research at the Cambridge University engineering laboratories on what has evolved into the modern scanning electron microscope. While much of the research was actually conducted by research students under Oatley’s supervision, he continually provided ideas, resources, and encouragement. He then was instrumental in having this instrument commercialized. His students often continued in the field for some time, making contributions both to the instrument and to its applications that led to improved performance and wider acceptance. This article attempts to capture some of the accomplishments of Sir Charles Oatley as seen by those who worked closely with him. The author believes that Sir Charles deserves the title: ‘‘Father of the Modern Scanning Electron Microscope.’’

 

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