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Magnetic Thin Films Prepared by Sputtering

 

作者: Eric Kay,  

 

期刊: Journal of Applied Physics  (AIP Available online 1961)
卷期: Volume 32, issue 3  

页码: 99-101

 

ISSN:0021-8979

 

年代: 1961

 

DOI:10.1063/1.2000516

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Experimental study of magnetic thin films prepared by sputtering in a glow discharge environmentshowed that crystal structure and chemical purity, as well as particle size and surface morphology, can becontrolled. Different physical properties, including B-H characteristics, can be reproducibily obtained bythe location of the collecting substrate with respect to the characteristic zones of the glow discharge; e.g.,Crookes dark space, negative glow, positive column, etc. This is the result of variations in deposition rateand energy distribution of the material arriving at the substrate, as well as variations in intensity of electronbombardment and the consequent temperature of the substrate. Typical results on nickel and iron filmsare reported. In contrast to several reports in the literature, ferromagnetic fcc nickel films were depositeddirectly by sputtering. Completely unoriented, polycrystalline bcc Fe films were prepared in whichBr/Bs∼1,Hc∼250 oe, andBr∼20 000oe; i.e., the magnetic characteristics were quite different from those obtainedby high vacuum evaporation.

 

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