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Superconductivity of Niobium Thin Films Deposited by dc Diode Sputtering

 

作者: J. Sosniak,   G. W. Hull,  

 

期刊: Journal of Applied Physics  （AIP Available online 1967）
卷期: Volume 38, issue 11  

页码: 4390-4392

 

ISSN:0021-8979

 

年代: 1967

 

DOI:10.1063/1.1709136

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Niobium films with superconducting transition temperatures between 8.2° and 9.1°K have been deposited by dc diode sputtering. The results are shown to be due to the reduction of the film impurity content by extensive presputtering and high substrate temperatures.

 

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