A Fast Interference Method for Measuring the Degree of Surface Roughness
作者:
O.V. Angelsky,
I.A. Buchkovsky,
P.P. Maksimyak,
T.O. Perun,
期刊:
Journal of Modern Optics
(Taylor Available online 1991)
卷期:
Volume 38,
issue 1
页码: 1-4
ISSN:0950-0340
年代: 1991
DOI:10.1080/09500349114550011
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A fast interference method for rough-surface diagnostics is presented based on the measurement of boundary-field phase dispersion, giving both high speed and accuracy.
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