Layer by layer growth mode stabilization and step-edge smoothing of cation-stabilizedIn1−xGaxAsstrained layers grown on InP
作者:
Y. Robach,
A. Solére,
M. Gendry,
L. Porte,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1998)
卷期:
Volume 16,
issue 4
页码: 1786-1789
ISSN:1071-1023
年代: 1998
DOI:10.1116/1.590090
出版商: American Vacuum Society
关键词: (In,Ga)As
数据来源: AIP
摘要:
Scanning tunneling microscopy has been used to study the surface morphology of strainedIn1−xGaxAslayers (either 2% compressively or 2% tensilely strained forx=0.18orx=0.75,respectively) grown by molecular beam epitaxy on (001) InP substrate under cation-stabilized conditions. Under such growing conditions a smooth two-dimensional (2D) surface morphology is well preserved until the onset of plastic relaxation. This behavior is completely unlike the 2D/3D growth mode transition observed under As-stabilized conditions of growth. Along with the 2D growth mode stabilization, a step-edge smoothing is also observed. These results are assigned to a high value of step formation free energy on (4×2) reconstructed surfaces. The resultant increase in surface tension delays the onset of coherent 3D island formation beyond the onset of plastic relaxation and stabilizes 2D growth.
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