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Layer by layer growth mode stabilization and step-edge smoothing of cation-stabilizedIn1−xGaxAsstrained layers grown on InP

 

作者: Y. Robach,   A. Solére,   M. Gendry,   L. Porte,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1998)
卷期: Volume 16, issue 4  

页码: 1786-1789

 

ISSN:1071-1023

 

年代: 1998

 

DOI:10.1116/1.590090

 

出版商: American Vacuum Society

 

关键词: (In,Ga)As

 

数据来源: AIP

 

摘要:

Scanning tunneling microscopy has been used to study the surface morphology of strainedIn1−xGaxAslayers (either 2% compressively or 2% tensilely strained forx=0.18orx=0.75,respectively) grown by molecular beam epitaxy on (001) InP substrate under cation-stabilized conditions. Under such growing conditions a smooth two-dimensional (2D) surface morphology is well preserved until the onset of plastic relaxation. This behavior is completely unlike the 2D/3D growth mode transition observed under As-stabilized conditions of growth. Along with the 2D growth mode stabilization, a step-edge smoothing is also observed. These results are assigned to a high value of step formation free energy on (4×2) reconstructed surfaces. The resultant increase in surface tension delays the onset of coherent 3D island formation beyond the onset of plastic relaxation and stabilizes 2D growth.

 

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