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Wave‐to‐plasma power transfer in magnetically assisted high‐frequency discharges in argon

 

作者: J. Loureiro,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 78, issue 8  

页码: 4850-4854

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.359771

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simplified discharge model for the prediction of the wave‐to‐plasma power transfer in high‐frequency collisional argon plasmas in the presence of a static magnetic field is presented. The study is based on the solutions to the homogeneous electron Boltzmann equation for an oscillating electric field composed of a right‐ and left‐hand‐side rotating parts, moving around the magnetic‐field lines. The mean absorbed power per electron to maintain the plasma is calculated for a container with nonconducting surfaces and the results are then compared with an experiment in the literature. ©1995 American Institute of Physics.

 

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