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Use of electron gun to regulate the radio‐frequency plasma performance and beam optics

 

作者: M. E. Abdelaziz,   Z. Awaad,   S. G. Zakhary,   A. M. Abdel‐Ghaffar,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1994）
卷期: Volume 65, issue 4  

页码: 1454-1456

 

ISSN:0034-6748

 

年代: 1994

 

DOI:10.1063/1.1144942

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The addition of electrons in both rf plasma and ion beam extracted from a rf ion source enhanced the source’s performance and beam optics. The increase of plasma intensity increases the charge state of the extracted ions. The mixing of electrons with the ions within the ion beam decreases the space charge effect on beam expansion.

 

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