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Semiconductor Silicon Samples for Interlaboratory Comparison

 

作者: S. Niese,   K. Icker,   D. Birnstein,   J. Dubnack,   M. L. Böttger,  

 

期刊: Isotopenpraxis Isotopes in Environmental and Health Studies  （Taylor Available online 1989）
卷期: Volume 25, issue 6  

页码: 237-239

 

ISSN:0021-1915

 

年代: 1989

 

DOI:10.1080/10256018908624111

 

出版商: Taylor & Francis Group

 

关键词: antimony;arsenic;copper;impurities;interlaboratory comparisons;iron;neutron activation analysis;semiconductor materials;silicon

 

数据来源: Taylor

 

摘要:

Samples of semiconductor silicon are cutted from large monocrystals. The location of each sample within the rod has been registered. After investigating the concentration gradients of the interesting impurities, the samples are distributed. Copper concentrations of 0.42 ppb have been determined with a relative standard deviation of 6% and without a significant difference between two laboratories.

 

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